Contents

1 Research Background and Progress 1

1.1 Introduction 1

1.2 Research on Non-integrated ONNs 3

1.2.1 Non-integrated Free-Space Diffractive ONNs 3

1.2.2 Non-integrated Lens-Based ONNs 5

1.2.3 Other Non-integrated Spatial Bulk ONNs 5

1.3 Research on Integrated ONNs 6

1.3.1 Silicon-Based Integrated Interferometric ONNs 6

1.3.2 Silicon-Based Integrated WDM-System ONNs 7

1.3.3 Silicon-Based Integrated Diffractive ONNs 8

1.3.4 Other Integrated ONNs 8

1.4 Research Significance and Objectives 9

1.5 Main Content and Structure of the Thesis 10

References 12

2 Silicon-Based Integrated Diffractive Optical Neural

Network Model 17

2.1 Two-Dimensional Spatial Domain Electromagnetic

Propagation Model 17

2.2 Diffractive Optical Neural Network Training Model 25

2.3 Phase Weight Mapping Model 30

2.4 Summary 41

References 41

3 Silicon-Based Integrated Diffractive Optical Neural

Network Chip 43

3.1 Binary Classification Silicon-Based Integrated DONN Chip 43

3.1.1 Design of Structures 44

3.1.2 Simulation Verification 46

3.1.3 Performance Analysis 49

XIV Contents

3.2 Ternary Classification Silicon-Based Integrated DONN Chip 51

3.2.1 Design of Structures 51

3.2.2 Simulation Verification 56

3.2.3 Experimental Tests and Results Analysis 56

3.2.4 System Error Compensation 63

3.2.5 Performance Analysis 73

3.3 Ten Classification Silicon-Based Integrated DONN Chip 74

3.3.1 Design of Structures 75

3.3.2 Experimental Tests and Results Analysis 77

3.3.3 Performance Analysis 80

3.4 Summary 82

References 84

4 Research on Multifunctional Silicon-Based Integrated

Diffractive Optical Neural Network 85

4.1 Network Architecture 85

4.2 Serial-to-Parallel Conversion Technology Based on Arrayed

Waveguide Structure 86

4.2.1 Structure Design of Arrayed Waveguides 87

4.2.2 Experimental Testing of the Arrayed Waveguide

Structure 89

4.2.3 Silicon-Based Integrated Diffractive Optical Neural

Network with Serial-to-Parallel Conversion 91

4.3 Multi-task Silicon-Based Integrated Diffractive Optical

Neural Network 97

4.3.1 Multi-task Learning 97

4.3.2 Transfer Learning 99

4.3.3 Design of Structures 99

4.3.4 Simulation Verification 103

4.4 Summary 104

References 105

5 Conclusions and Future Perspectives 107

5.1 Conclusions of Research Work 107

5.2 Future Perspectives of Research Work 109

References 111